Precursor Steel Drum-20L
High-cleanliness pressure-resistant precursor container
The 20L pressure-resistant storage drum uses a 316L stainless steel substrate with a dedicated acid and alkali resistant coating on the inner wall, suited to corrosive semiconductor metal precursors, while the electropolished outer wall is easy to clean and resists dust. It handles a wide range from sub-zero to high temperatures with ample pressure margin, and a dual-gauge valve set on top provides sealed, pressure-controlled delivery, isolating moisture and air to prevent source material degradation. A reinforced protective lift frame aids cleanroom transfer, and the drum resists media residue — suited to medium-volume precursor storage and stable feeding in ALD and CVD mass production.
Precursor Steel Drum-20L
High-cleanliness pressure-resistant precursor container
The 20L pressure-resistant storage drum uses a 316L stainless steel substrate with a dedicated acid and alkali resistant coating on the inner wall, suited to corrosive semiconductor metal precursors, while the electropolished outer wall is easy to clean and resists dust. It handles a wide range from sub-zero to high temperatures with ample pressure margin, and a dual-gauge valve set on top provides sealed, pressure-controlled delivery, isolating moisture and air to prevent source material degradation. A reinforced protective lift frame aids cleanroom transfer, and the drum resists media residue — suited to medium-volume precursor storage and stable feeding in ALD and CVD mass production.
※ Specifications
| Product number | JSD-GT-316L-20L-PC01 |
|---|---|
| Dimension | φ293±2mm*H550±2mm |
| Material | 316L |
| Body thickness | 2.0t±0.2 |
| Design / working temperature | -70℃~90℃ / ambient |
| Working / test pressure | 0.7MPa/0.9MPa |
| Inner & outer surface treatment | Inner wall: acid and alkali resistant coating |
| Outer wall: electrolytic polishing |
※ Product Schematic
※ Specifications
| Product number | JSD-GT-316L-20L-PC01 |
|---|---|
| Dimension | φ293±2mm*H550±2mm |
| Material | 316L |
| Body thickness | 2.0t±0.2 |
| Design / working temperature | -70℃~90℃ / ambient |
| Working / test pressure | 0.7MPa/0.9MPa |
| Inner & outer surface treatment | Inner wall: acid and alkali resistant coating |
| Outer wall: electrolytic polishing |