Precursor Steel Drum-20L

High-cleanliness pressure-resistant precursor container

Precursor Steel Drum-20L

The 20L pressure-resistant storage drum uses a 316L stainless steel substrate with a dedicated acid and alkali resistant coating on the inner wall, suited to corrosive semiconductor metal precursors, while the electropolished outer wall is easy to clean and resists dust. It handles a wide range from sub-zero to high temperatures with ample pressure margin, and a dual-gauge valve set on top provides sealed, pressure-controlled delivery, isolating moisture and air to prevent source material degradation. A reinforced protective lift frame aids cleanroom transfer, and the drum resists media residue — suited to medium-volume precursor storage and stable feeding in ALD and CVD mass production.

※ Specifications

Product numberJSD-GT-316L-20L-PC01
Dimensionφ293±2mm*H550±2mm
Material316L
Body thickness2.0t±0.2
Design / working temperature-70℃~90℃ / ambient
Working / test pressure0.7MPa/0.9MPa
Inner & outer surface treatmentInner wall: acid and alkali resistant coating
Outer wall: electrolytic polishing

※ Product Schematic

Drawing 1
Drawing 2