Precursor Steel Drum-200L

High-cleanliness pressure-resistant precursor container

Precursor Steel Drum-200L

The 200L storage drum is a large-capacity precursor tank designed for wafer mass production. Forged in one piece from thickened 316L stainless steel, its double mirror-electropolished inner wall greatly reduces media adsorption and retention, keeping source material purity stable. Suited to wide high-to-low temperature conditions with stringent pressure safety standards, it comes with a fixed load-bearing base for forklift transfer around the plant. The wide opening makes filling and liner replacement easy under clean conditions, and fully sealed storage isolates moisture and oxygen to prevent sensitive metal precursors from degrading — meeting centralised, pressure-stable feeding needs across multiple thin-film deposition lines.

※ Specifications

Product numberJSD-GT-316L-200L-PC01
Dimensionφ608±2mm*H1290±2mm
Material316L
Body thickness4.0t±0.2
Design / working temperature-70℃~90℃ / ambient
Working / test pressure0.09MPa/0.5MPa
Inner & outer surface treatmentInner wall: mirror polishing + electrolytic polishing
Outer wall: electrolytic polishing

※ Product Schematic

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