Precursor Steel Drum-18L

High-cleanliness pressure-resistant precursor container

Precursor Steel Drum-18L

The 18L storage drum is made from thickened 316L stainless steel with the body electropolished inside and out to ultra-low roughness. The smooth, non-adsorbing inner wall prevents semiconductor precursor residue and metal impurity leaching. It supports a wide temperature range with a high pressure safety factor, and the top integrates a dual-gauge pressure-regulating line for fully sealed isolation from air and moisture, preventing sensitive precursors from oxidising. An external protective lift frame aids workshop transfer. Suited to CVD and ALD thin-film deposition, it meets the needs of pilot lines for stable storage and automated delivery of medium volumes of high-purity metal sources.

※ Specifications

Product numberJSD-GT-316L-18L-PC01
Dimensionφ245±2mm*H695±2mm
Material316L
Body thickness2.0t±0.2
Design / working temperature-70℃~90℃ / ambient
Working / test pressure0.7MPa/0.9MPa
Inner & outer surface treatmentInner wall: electrolytic polishing ≤0.4um
Outer wall: electrolytic polishing

※ Product Schematic

Drawing 1
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