Precursor Steel Drum-18L
High-cleanliness pressure-resistant precursor container
The 18L storage drum is made from thickened 316L stainless steel with the body electropolished inside and out to ultra-low roughness. The smooth, non-adsorbing inner wall prevents semiconductor precursor residue and metal impurity leaching. It supports a wide temperature range with a high pressure safety factor, and the top integrates a dual-gauge pressure-regulating line for fully sealed isolation from air and moisture, preventing sensitive precursors from oxidising. An external protective lift frame aids workshop transfer. Suited to CVD and ALD thin-film deposition, it meets the needs of pilot lines for stable storage and automated delivery of medium volumes of high-purity metal sources.
Precursor Steel Drum-18L
High-cleanliness pressure-resistant precursor container
The 18L storage drum is made from thickened 316L stainless steel with the body electropolished inside and out to ultra-low roughness. The smooth, non-adsorbing inner wall prevents semiconductor precursor residue and metal impurity leaching. It supports a wide temperature range with a high pressure safety factor, and the top integrates a dual-gauge pressure-regulating line for fully sealed isolation from air and moisture, preventing sensitive precursors from oxidising. An external protective lift frame aids workshop transfer. Suited to CVD and ALD thin-film deposition, it meets the needs of pilot lines for stable storage and automated delivery of medium volumes of high-purity metal sources.
※ Specifications
| Product number | JSD-GT-316L-18L-PC01 |
|---|---|
| Dimension | φ245±2mm*H695±2mm |
| Material | 316L |
| Body thickness | 2.0t±0.2 |
| Design / working temperature | -70℃~90℃ / ambient |
| Working / test pressure | 0.7MPa/0.9MPa |
| Inner & outer surface treatment | Inner wall: electrolytic polishing ≤0.4um |
| Outer wall: electrolytic polishing |
※ Product Schematic
※ Specifications
| Product number | JSD-GT-316L-18L-PC01 |
|---|---|
| Dimension | φ245±2mm*H695±2mm |
| Material | 316L |
| Body thickness | 2.0t±0.2 |
| Design / working temperature | -70℃~90℃ / ambient |
| Working / test pressure | 0.7MPa/0.9MPa |
| Inner & outer surface treatment | Inner wall: electrolytic polishing ≤0.4um |
| Outer wall: electrolytic polishing |